The University of Southampton

Schematic view of the electrostatic levitation system.
Theme:
MEMs and NEMs
Funding:
EPSRC

The aim of this project is to levitate and manipulate micromachined objects of various sizes and shapes using electrostatic fields. The project is part of a multidisciplinary EPSRC project that aims to develop new laser ion sources. Recent experiments have demonstrated that high-power laser irradiation of micro-targets generates intense, high-energy beams of protons, ions, neutrons, electrons, gamma, and x-rays. This process requires micro-targets to be suspended without physical means of attachment, because such supports are known to perturb the ion-beam production mechanism and generate unnecessary debris. To achieve the vision of a target delivery system using micromachining technology, micromachined objects (material silicon) are levitated by electrodes against the force of gravity. This is achieved by rapidly applying pulses of voltages of constant amplitude to the levitation electrodes, depending on whether the disk has been displaced in positive or negative z-direction. A voltage of 10V is sufficient for a disk with diameter between 30-100 um. The same electrodes can capacitively measure in which direction the disk has been displaced, and then energise electrode so that a counterbalancing force is actuated on the disk. Other application areas of such a system are micromachined gyroscopes and accelerometers with levitated proof mass, RF systems, and electrostatic switches and actuators.

Primary investigators

  • mk1
  • is2
  • clc06r

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Date:
2007-
Themes:
Nanophotonics and Biomimetics, Nanoelectronics

Inspired by nature's highly - evolved technique of producing antireflection in the eyes and wings of some species of moth, densely-packed pillars with heights and spacings of approximately 200 nm are created for use in solar cells. The effective refractive index gratings that are produced allow for broad range of wavelengths and angles of incidence to be antireflected efficiently. We are investigating ways to produce high quality antireflection layers on silicon using nanosphere lithography, a cheap, large-area and massively parallel self-assembly method.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Date:
2006-2009
Theme:
Nanophotonics and Biomimetics
Funding:
Department

Planar waveguides are different from photonic crystal fibres (PCFs) in that planar waveguides require high nonlinear coefficient core material for achieving the desired nonlinear effects within a short distance of propagation. The most significant advantage of planar waveguides is their capability of integration with other components to constitute a building block in integrated optical circuits. The goal of this project is to design the planar waveguides with different geometries, including rib, ridge, taper, and photonic crystals, to achieve low cost on chip nonlinear devices that are capable to perform high efficiency nonlinear processes such as optical parametric amplification, supercontinuum generation (SCG), and etc.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Date:
2006-2010
Theme:
Nanophotonics and Biomimetics
Funding:
Department

Planar waveguides are different from photonic crystal fibres (PCFs) in that planar waveguides require high nonlinear coefficient core material for achieving the desired nonlinear effects within a short distance of propagation. The most significant advantage of planar waveguides is their capability of integration with other components to constitute a building block in integrated optical circuits. The goal of this project is to design the planar waveguides with different geometries, including rib, ridge, taper, and photonic crystals, to achieve low cost on chip nonlinear devices that are capable to perform high efficiency nonlinear processes such as optical parametric amplification, supercontinuum generation (SCG), and etc.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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a) Example of the quadrupolar electrodes used in the project b) SEM picture of the particles.
Theme:
Microfluidics and Lab-on-a-chip

Particles can show a wide range of movement patterns according to the characteristic of the AC electric field applied: because of their induced dipole they can shift to high (or low) field regions, rotate or align to the field. Particle behaviour has a strong dependence on how freely ions can move along the surface. Functionalising the surface of the particle with biological molecules changes the current flow around the particle, modifying the direction and the speed of its motion. Using 4 electrodes, it is possible to induce a controlled movement of the particles, in our case we are working with orientation and rotation. The motion of the particle at different frequencies can be recorded with a computer and then analyzed to estimate surface electrical properties. Different chemical reactions on the surface will lead to different properties. The aim of the project is to detect binding events of antibodies and DNA to the particles, once they have been functionalised with the appropriate probe biomolecules.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Theme:
Microfluidics and Lab-on-a-chip

Impedance spectroscopy (IS) represents a powerful label-free method for cell analysis. The technique allows quantitative measurement of the inherent electrical and dielectric properties of cells; such as membrane capacitance, membrane resistance, cytoplasmic conductivity and permittivity. These properties directly reflect the cell’s biological structure and metabolic state. Widespread use of IS has been limited by the technical complexity and time consuming nature of the measurement process. Measurements are typically performed on suspensions of cells, giving a population averaged value for the properties of the cell. This represents a significant drawback making the identification of cell sub-populations and cell sorting impossible. AC electrokinetic techniques such as electrorotation have allowed researchers to measure cell dielectric properties, at the single cell level, however it takes many minutes to measure each cell.

Recently, we have developed a high throughput micro impedance cytometer technology, capable of rapidly measuring the dielectric properties of individual cells in a flow though format similar to that of a traditional flow cytometer (>1000 cells per second). The general principle of the single cell impedance cytometry system is shown in the figure. The impedance of single cells is measured using micro-electrodes fabricated within a micro-channel (typical dimensions are 20μm by 40μm). The system can also measure the optical properties of the cell simultaneously with impedance, allowing independent identification of cell phenotype or physiological state through the use of fluorescent probes (e.g. DNA intercalating dyes, other cell markers).

We have demonstrated that the micro impedance cytometer system can differentiate between the three major human leukocyte sub-populations (monocytes, neutropils, T-lymphocytes), without the need for labelling, based on known differences in their cell membrane dielectric properties.

Primary investigators

Secondary investigator

  • Donna E. Davies

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Measuring the S Parameter of the RF MEMS Switch.
Theme:
MEMs and NEMs
Funding:
Department

Many investigations have been directed at reducing the operating actuation voltage of RF MEMS switches. One of the possible solutions is through the reduction of the mechanical spring constant of the switch design. The proposed RF MEMS switch design portrays the use of an armature without any mechanical suspension attached to the substrate, eliminating in this way the mechanical spring constant of the device, thus reducing the actuation voltage. The operating principle of the switch mainly lies on creating a net zero charge on the armature by applying opposite polarity voltages on either the top or bottom actuation electrodes.

Ultimate goal of the project is to develop a low voltage RF MEMS switch that can be easily interface to existing IC technology.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Trapping single 15um polystyrene beads in (a) a large 80um diameter trap and (b) 4 independent 40um diameter traps.
Date:
2005-2009
Theme:
Microfluidics and Lab-on-a-chip

We have developed electrodes to immobilise single cells and particles within a microfluidic channel inside a dielectrophoretic trap. The design is highly scalable, and suitable for trapping cells from culture in physiological media. Arrays of these traps have been used to separate mixed populations of fluorescently labelled cells, and these have been recovered and cultured.

Primary investigators

Secondary investigator

  • rst05r

Associated research group

  • Nano Research Group
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SEM detail from the output of a mechanically amplified capacitive accelerometer.
Date:
2007-
Theme:
MEMs and NEMs
Funding:
Department

In this project the application of mechanical amplification in MEMS is investigated. In particular the scheme is applied in capacitive accelerometers to improve their performance in terms of sensitivity and bandwidth. Mechanical amplification can offer lower gain requirements of the interface circuitry, reduced noise, and increased sensitivity by mechanically enhancing the output signal prior to the interface circuitry. The proposed amplifying mechanism, implemented in a capacitive accelerometer, exploits the leverage principle by using micromachined microlevers to amplify the displacement of the proof-mass.

The ultimate goal of this research is to create an analytical framework for the application of mechanical amplification in inertial sensors and MEMS in general. Effectively, after the proof of concept this will be used to improve the sensitivity of other more complex sensors such as gyroscopes.

Primary investigators

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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Performance of electrostatic actuators for optical tuning
Theme:
MEMs and NEMs
Funding:
EP/E043631/1

Atom chips are microfabricated surfaces capable of splitting, guiding and manipulating atoms by application of electric and magnetic fields. Although some basic functionalities were demonstrated earlier, integration of these functions still remains a challenge from microfabrication stand point. The integrated atom chips with stacked layers were prone for misalignment during fabrication. We have therefore micrabricated electrostatic actuators to compensate the misalignments in the stacked layers. The electrostatic actuator structures consists of flexures and trusses to move the optical mirrors in the wafer plane in order to compensate the misalignements if any, besides facilitating to tune the optical cavity for characterising the atoms.

Primary investigators

  • ps2
  • mk1

Partner

  • Blackett Laboratory, Imperial College, London

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
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